See http://viewvc.slicer.org/viewvc.cgi/Slicer4?view=revision&revision=21772

Could you confirm that the dcmtk library listed in the CMakeCache.txt of both "Slicer inner build" and "ITKv4 build" directories are the same.

Yes, they are the same (see below). I will try a fresh rebuild with the new ITK.

pieper@flint:~/slicer4/latest/Slicer-superbuild$ grep DCMTK_DIR Slicer-build/CMakeCache.txt ITKv4-build/CMakeCache.txt
Slicer-build/CMakeCache.txt:DCMTK_DIR:PATH=/home/pieper/slicer4/latest/Slicer-superbuild/DCMTK-install
ITKv4-build/CMakeCache.txt:DCMTK_DIR:PATH=/home/pieper/slicer4/latest/Slicer-superbuild/DCMTK-install

What about the variables like: DCMTK_(.+)_LIBRARY ?

Too late to check - the build tree is gone.

Fresh build with r21773 (new ITKv4) gives same crash on exit (trave below).

And all the paths point to the superbuild tree - for example:

pieper@flint:~/slicer4/latest/Slicer-superbuild$ grep DCMTK_dcmdata Slicer-build/CMakeCache.txt ITKv4-build/CMakeCache.txt | grep LIBRARY | grep FILEPATH
Slicer-build/CMakeCache.txt:DCMTK_dcmdata_LIBRARY_DEBUG:FILEPATH=/home/pieper/slicer4/latest/Slicer-superbuild/DCMTK-install/lib/libdcmdata.a
Slicer-build/CMakeCache.txt:DCMTK_dcmdata_LIBRARY_RELEASE:FILEPATH=/home/pieper/slicer4/latest/Slicer-superbuild/DCMTK-install/lib/libdcmdata.a
ITKv4-build/CMakeCache.txt:DCMTK_dcmdata_LIBRARY_DEBUG:FILEPATH=/home/pieper/slicer4/latest/Slicer-superbuild/DCMTK-install/lib/libdcmdata.a
ITKv4-build/CMakeCache.txt:DCMTK_dcmdata_LIBRARY_RELEASE:FILEPATH=/home/pieper/slicer4/latest/Slicer-superbuild/DCMTK-install/lib/libdcmdata.a

Program received signal SIGSEGV, Segmentation fault.
0x00007ffff5f645e4 in OFListBase::base_empty (this=0x20) at /home/pieper/slicer4/latest/Slicer-superbuild/DCMTK/ofstd/include/dcmtk/ofstd/oflist.h:123
123 OFBool base_empty() const { return afterLast == afterLast->next; }
(gdb) where
#0 0x00007ffff5f645e4 in OFListBase::base_empty (this=0x20) at /home/pieper/slicer4/latest/Slicer-superbuild/DCMTK/ofstd/include/dcmtk/ofstd/oflist.h:123
0000001 0x00007ffff5f6474a in OFList<DcmDictEntry*>::empty (this=0x20) at /home/pieper/slicer4/latest/Slicer-superbuild/DCMTK/ofstd/include/dcmtk/ofstd/oflist.h:347
0000002 0x00007ffff5f637f6 in DcmDictEntryList::empty (this=0x20) at /home/pieper/slicer4/latest/Slicer-superbuild/DCMTK/dcmdata/libsrc/dchashdi.cc:121
0000003 0x00007ffff5f63491 in DcmDictEntryList::clear (this=0x20) at /home/pieper/slicer4/latest/Slicer-superbuild/DCMTK/dcmdata/libsrc/dchashdi.cc:43
0000004 0x00007ffff5f63419 in DcmDictEntryList::~DcmDictEntryList (this=0x20, in_chrg=<optimized out>)
at /home/pieper/slicer4/latest/Slicer-superbuild/DCMTK/dcmdata/libsrc/dchashdi.cc:37
0000005 0x00007ffff5f63da6 in DcmHashDict::clear (this=0x31f52f0) at /home/pieper/slicer4/latest/Slicer-superbuild/DCMTK/dcmdata/libsrc/dchashdi.cc:259
0000006 0x00007ffff5f4866a in DcmDataDictionary::clear (this=0x31f52f0) at /home/pieper/slicer4/latest/Slicer-superbuild/DCMTK/dcmdata/libsrc/dcdict.cc:128
0000007 0x00007ffff5f485fd in DcmDataDictionary::~DcmDataDictionary (this=0x31f52f0, __in_chrg=<optimized out>)
at /home/pieper/slicer4/latest/Slicer-superbuild/DCMTK/dcmdata/libsrc/dcdict.cc:122
0000008 0x00007ffff5f4af23 in GlobalDcmDataDictionary::~GlobalDcmDataDictionary (this=0x7ffff641fc20 <dcmDataDict>, in_chrg=<optimized out>)
at /home/pieper/slicer4/latest/Slicer-superbuild/DCMTK/dcmdata/libsrc/dcdict.cc:799
0000009 0x00007fffd50e9d1d in cxa_finalize () from /lib/x86_64-linux-gnu/libc.so.6
0000010 0x00007ffff5c721d3 in do_global_dtors_aux () from /home/pieper/slicer4/latest/Slicer-superbuild/CTK-build/CTK-build/bin/libCTKDICOMCore.so.0.1
0000011 0x00007fffffffd2f0 in ?? ()
0000012 0x00007ffff7de991e in ?? () from /lib64/ld-linux-x86-64.so.2
Backtrace stopped: previous frame identical to this frame (corrupt stack?)

Fixed by building dcmtk as shared library